[{"data":1,"prerenderedAt":-1},["ShallowReactive",2],{"detail-sidebar-cat-0-en-105":3,"doc-seo-390183-105":59,"doc-detail-390183-en":131},{"code":4,"msg":5,"data":6},0,"success",[7,13,18,23,28,33,38,43,48,51,55],{"id":8,"doc_module":4,"doc_module_name":9,"category_name":10,"show_sort_weight":11,"slug":12},1,"Document","Story & Novel",90,"story-novel",{"id":14,"doc_module":4,"doc_module_name":9,"category_name":15,"show_sort_weight":16,"slug":17},2,"Literature",80,"literature",{"id":19,"doc_module":4,"doc_module_name":9,"category_name":20,"show_sort_weight":21,"slug":22},4,"Exam",70,"exam",{"id":24,"doc_module":4,"doc_module_name":9,"category_name":25,"show_sort_weight":26,"slug":27},5,"Comic",60,"comic",{"id":29,"doc_module":4,"doc_module_name":9,"category_name":30,"show_sort_weight":31,"slug":32},6,"Technology",50,"technology",{"id":34,"doc_module":4,"doc_module_name":9,"category_name":35,"show_sort_weight":36,"slug":37},7,"Healthcare",40,"healthcare",{"id":39,"doc_module":4,"doc_module_name":9,"category_name":40,"show_sort_weight":41,"slug":42},8,"Research & Report",30,"research-report",{"id":44,"doc_module":4,"doc_module_name":9,"category_name":45,"show_sort_weight":46,"slug":47},9,"Religion & Spirituality",20,"religion-spirituality",{"id":46,"doc_module":4,"doc_module_name":9,"category_name":49,"show_sort_weight":46,"slug":50},"World Cup","world-cup",{"id":52,"doc_module":4,"doc_module_name":9,"category_name":53,"show_sort_weight":52,"slug":54},10,"Lifestyle","lifestyle",{"id":56,"doc_module":4,"doc_module_name":9,"category_name":57,"show_sort_weight":24,"slug":58},19,"General","general",{"code":4,"msg":60,"data":61},"ok",{"site_id":62,"language":63,"slug":64,"title":65,"keywords":66,"description":67,"schema_data":68,"social_meta":124,"head_meta":126,"extra_data":128,"updated_unix":130},105,"en","pendulum-valve-control-system-series-65","Pendulum valve control system - Series 65","","Pendulum valve control system Series 65 specification covers downstream pressure control with isolation valve use in SEMI and FPD processes, optimized for corrosive etching and cleaning. Ordering information defines valve options with stepper motor and integrated pressure controller, multiple controller configurations, interface sensor counts, and communication types such as RS232, DeviceNet, Profibus, RS485, Ethernet, CC-Link, and EtherCAT. Technical sections describe functional principle, sealing behavior for leak-tight closing and opening, plus key leak-rate, pressure-range, cycles, materials, mounting positions, and actuator timing.",{"@graph":69,"@context":123},[70,84,106],{"@type":71,"itemListElement":72},"BreadcrumbList",[73,77,79,82],{"item":74,"name":75,"@type":76,"position":8},"https://docshare.wps.com","Home","ListItem",{"item":78,"name":9,"@type":76,"position":14},"https://docshare.wps.com/document/",{"item":80,"name":30,"@type":76,"position":81},"https://docshare.wps.com/document/technology/",3,{"item":83,"name":65,"@type":76,"position":19},"https://docshare.wps.com/document/pendulum-valve-control-system-series-65/390183/",{"url":83,"name":65,"@type":85,"image":86,"author":91,"headline":65,"publisher":94,"fileFormat":97,"inLanguage":63,"description":67,"dateModified":98,"datePublished":99,"encodingFormat":97,"isAccessibleForFree":100,"interactionStatistic":101},"DigitalDocument",{"url":87,"@type":88,"width":89,"height":90},"https://docshare.wps.com/thumbnails/pendulum-valve-control-system-series-65/390183.png","ImageObject",300,407,{"name":92,"@type":93},"Stanley","Person",{"url":74,"name":95,"@type":96},"DocShare","Organization","application/pdf","2026-10-22","2026-09-25",true,{"@type":102,"interactionType":103,"userInteractionCount":105},"InteractionCounter",{"@type":104},"ViewAction",12,{"@type":107,"mainEntity":108},"FAQPage",[109,115,119],{"name":110,"@type":111,"acceptedAnswer":112},"What are the main applications of the Series 65 pendulum valve control system?","Question",{"text":113,"@type":114},"It is used for downstream pressure control and isolation valves in SEMI and FPD processes, especially for corrosive etching and cleaning.","Answer",{"name":116,"@type":111,"acceptedAnswer":117},"How does the system achieve pressure control?",{"text":118,"@type":114},"The pressure controller calculates the required plate position for the setpoint pressure, actuated by a stepper motor with an encoder monitoring the position.",{"name":120,"@type":111,"acceptedAnswer":121},"What sealing behavior supports leak-tight closing and opening?",{"text":122,"@type":114},"For leak-tight closing, the sealing ring is pressed downward by a spring; for opening, the sealing ring is lifted pneumatically.","https://schema.org",{"og:url":83,"og:type":125,"og:title":65,"og:site_name":95,"og:description":67},"article",{"robots":127,"canonical":83},"index,follow",{"doc_id":129,"site_id":62},390183,1790449992,{"code":4,"msg":5,"data":132},{"doc_id":129,"user_id":133,"nickname":92,"user_avatar":134,"doc_module":4,"category_id":29,"category_name":30,"doc_title":65,"doc_description":67,"doc_content":135,"file_id":136,"file_url":137,"file_type":138,"file_size":139,"view_count":105,"is_deleted":4,"is_public":8,"is_downloadable":8,"audit_status":8,"page_count":44,"language":140,"language_code":63,"site_id":62,"html_lang":63,"table_of_contents":141,"faqs":142,"seo_title":143,"seo_description":67,"update_tm":144,"read_time":145},2336477405376,"https://ap-avatar.wpscdn.com/davatar_29158cc5080c5b710cf443261637dec0","Pendulum valve control system  Series 65  \nSeries 65.0  \nMain applications  \nDownstream pressure control and isolation valve for SEMI and FPD processes  \nOptimal for corrosive etching and cleaning processes  \nOrdering information  \nValve with stepper motor  \nand integrated pressure controller  \nController configurations:  \n\n| DN |  | Ordering numbers\u003Cbr>aluminum  aluminum, hard anodized\u003Cbr>ISO-F  JIS  ISO-F  JIS |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |\n| --- | --- | --- | --- | --- | --- | --- | --- | --- | --- | --- | --- | --- | --- | --- | --- | --- | --- |\n| mm | inch |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |\n| 100 | 4 | 65040-PA | x | y |  | 65040-JA | x | y |  | 65040-PH | x | y |  | 65040-JH | x | y |  |\n| 160 | 6 | 65044-PA | x | y |  | 65044-JA | x | y |  | 65044-PH | x | y |  | 65044-JH | x | y |  |\n| 200 | 8 | 65046-PA | x | y |  | 65046-JA | x | y |  | 65046-PH | x | y |  | 65046-JH | x | y |  |\n| 250 | 10 | 65048-PA | x | y |  | 65048-JA | x | y |  | 65048-PH | x | y |  | 65048-JH | x | y |  |\n| 320 | 12 | 65050-PA | x | y |  | 65050-JA | x | y |  | 65050-PH | x | y |  | 65050-JH | x | y |  |\n| 350 | 14 | – |  |  |  | 65051-JA | x | y |  | – |  |  |  | 65051-JH | x | y |  |\n| 400 | 16 | 65052-PA | x | y |  | 65052-JA | x | y |  | 65052-PH | x | y |  | 65052-JH | x | y |  |\n\nx ~~  ~~G = basic version  \nNumber of Interface sensors  \nA = with SPSH = with PFO  \nC = with SPS and PFO  \nT = basic version with VC master V = with SPS and VC master U = with PFO and VC master W = with SPS, PFO and VC master  \nSPS = Sensor Power Supply  \n(±15 V DC power supply for sensor)  \nPFO = Power Failure Option  \n(valve closes /opens automatically at power failure)  \nVC = Valve Cluster (for operating several valves synchronously)  \nExample: 65040-PAGG = Aluminum valve  \nwith ISO-F DN 100 flanges, RS232 interface, for 1 sensor  \nG = RS232 1  \nH = RS232 2  \nC = Logic 1  \nE = Logic 2  \nP = DeviceNet® 1  \nQ = DeviceNet® 2  \nD = Profibus 1  \nF = Profibus 2  \nJ = RS485 1  \nK = RS485 2  \nY = Ethernet 1  \nZ = Ethernet 2  \nL = CC-Link 1  \nN = CC-Link 2  \nI = EtherCAT 1  \nX = EtherCAT 2  \nS = VC slave (without interface)  \nPressure controller: see pages 146–149  \nFeatures  \nBodymaterial:  \naluminum or aluminum, hard anodized Compact design  \nFast, virtually particle-free and shockfree operation  \nIntegrated or external pressure controller Extremely short control response times Position indication  \nService port for connecting a computer or a service box 2  \nEasy maintenance  \n Series 65  \n\n| Functional principle |  |  |  |  |  |\n| --- | --- | --- | --- | --- | --- |\n| 1\u003Cbr>2\u003Cbr>3a\u003Cbr>3b | Plate Sealing ring Plate seal Body seal | 4 5\u003Cbr>6 7 | Bonnet seal Actuator shaft\u003Cbr>Actuator Controller | 8 9\u003Cbr>10\u003Cbr>􀀄 | Shaft feedthrough seal Rotary feedthrough seal Piston ring seal Valve seat side |\n\nThe plate acts as a throttling element and varies the conductance of the valve opening. The pressure controller calculates the required plate position to achieve thesetpoint pressure. See also principle drawing on page 280. Actuation is performed by a stepper motor. An encoder monitors the position. This principle ensures fast and accurate process pressure control.  \nFor leaktight closing the sealing ring is pressed downwards by a spring. For opening the sealing ring is lifted pneumatically.  \nPressure control  \nIsolation  \nB  \nPendulum valve control system  Series 65  \nTechnical data  \n1) Unheated on delivery  \n2) Maximum values: depending on operating conditions and sealing materials  \n3) Valve seat on chamber side recommended  \nLeak rate 1) : valve body  \n– Aluminum  \n– Aluminum, hard anodized  \nLeak rate 1) : valve seat  \n– Aluminum  \n– Aluminum, hard anodized Pressure range 1)  \n– Aluminum  \n– Aluminum, hard anodized  \nCycles until first service 2)  \n– Pressure control  \n– Closing / opening  \nTemperature 2)  \n– Valve body  \n– Ambient Material  \n– Valve body, plate  \n– Sealing ring  \n– Other parts  \nSeal: bonnet, plate, body, feedthrough  \nF","cbCaihAU1FgPGXCb","https://ap.wps.com/l/cbCaihAU1FgPGXCb","pdf",2044278,"English","# Main applications\n# Ordering information\n## Controller configurations\n# Features\n# Pressure control and isolation\n# Technical data\n## Leak rate and pressure ranges\n## Materials and mounting position\n# Functional principle\n# Options","[{\"question\":\"What are the main applications of the Series 65 pendulum valve control system?\",\"answer\":\"It is used for downstream pressure control and isolation valves in SEMI and FPD processes, especially for corrosive etching and cleaning.\"},{\"question\":\"How does the system achieve pressure control?\",\"answer\":\"The pressure controller calculates the required plate position for the setpoint pressure, actuated by a stepper motor with an encoder monitoring the position.\"},{\"question\":\"What sealing behavior supports leak-tight closing and opening?\",\"answer\":\"For leak-tight closing, the sealing ring is pressed downward by a spring; for opening, the sealing ring is lifted pneumatically.\"}]","Pendulum valve control system - Series 65 | PDF",1790331096,23]