[{"data":1,"prerenderedAt":-1},["ShallowReactive",2],{"detail-sidebar-cat-0-en-105":3,"doc-seo-156455-105":59,"doc-detail-156455-en":130},{"code":4,"msg":5,"data":6},0,"success",[7,13,18,23,28,33,38,43,48,51,55],{"id":8,"doc_module":4,"doc_module_name":9,"category_name":10,"show_sort_weight":11,"slug":12},1,"Document","Story & Novel",90,"story-novel",{"id":14,"doc_module":4,"doc_module_name":9,"category_name":15,"show_sort_weight":16,"slug":17},2,"Literature",80,"literature",{"id":19,"doc_module":4,"doc_module_name":9,"category_name":20,"show_sort_weight":21,"slug":22},4,"Exam",70,"exam",{"id":24,"doc_module":4,"doc_module_name":9,"category_name":25,"show_sort_weight":26,"slug":27},5,"Comic",60,"comic",{"id":29,"doc_module":4,"doc_module_name":9,"category_name":30,"show_sort_weight":31,"slug":32},6,"Technology",50,"technology",{"id":34,"doc_module":4,"doc_module_name":9,"category_name":35,"show_sort_weight":36,"slug":37},7,"Healthcare",40,"healthcare",{"id":39,"doc_module":4,"doc_module_name":9,"category_name":40,"show_sort_weight":41,"slug":42},8,"Research & Report",30,"research-report",{"id":44,"doc_module":4,"doc_module_name":9,"category_name":45,"show_sort_weight":46,"slug":47},9,"Religion & Spirituality",20,"religion-spirituality",{"id":46,"doc_module":4,"doc_module_name":9,"category_name":49,"show_sort_weight":46,"slug":50},"World Cup","world-cup",{"id":52,"doc_module":4,"doc_module_name":9,"category_name":53,"show_sort_weight":52,"slug":54},10,"Lifestyle","lifestyle",{"id":56,"doc_module":4,"doc_module_name":9,"category_name":57,"show_sort_weight":24,"slug":58},19,"General","general",{"code":4,"msg":60,"data":61},"ok",{"site_id":62,"language":63,"slug":64,"title":65,"keywords":66,"description":67,"schema_data":68,"social_meta":123,"head_meta":125,"extra_data":127,"updated_unix":129},105,"en","microfabrication-and-experimental-characterization-of-an-out-of-plane-mems-switch","Microfabrication and experimental characterization of an Out-of-Plane MEMS switch","","The paper presents a method to enhance the performance of a vertical-movement MicroElectro-Mechanical (MEMS) switch manufactured via surface micromachining. The study targets critical technological dimensions—gap and arm thickness—to achieve a released, stable mechanical structure while preventing stiction in metallic components. Experiments and material/process characterization are combined with Scanning Electron Microscopy (SEM) and electro-thermo-mechanical analysis using CoventorWare and Comsol simulations.",{"@graph":69,"@context":122},[70,84,105],{"@type":71,"itemListElement":72},"BreadcrumbList",[73,77,79,82],{"item":74,"name":75,"@type":76,"position":8},"https://docshare.wps.com","Home","ListItem",{"item":78,"name":9,"@type":76,"position":14},"https://docshare.wps.com/document/",{"item":80,"name":40,"@type":76,"position":81},"https://docshare.wps.com/document/research-report/",3,{"item":83,"name":65,"@type":76,"position":19},"https://docshare.wps.com/document/microfabrication-and-experimental-characterization-of-an-out-of-plane-mems-switch/156455/",{"url":83,"name":65,"@type":85,"image":86,"author":91,"headline":65,"publisher":94,"fileFormat":97,"inLanguage":63,"description":67,"dateModified":98,"datePublished":99,"encodingFormat":97,"isAccessibleForFree":100,"interactionStatistic":101},"DigitalDocument",{"url":87,"@type":88,"width":89,"height":90},"https://docshare.wps.com/thumbnails/microfabrication-and-experimental-characterization-of-an-out-of-plane-mems-switch/156455.png","ImageObject",300,407,{"name":92,"@type":93},"Chumphorn","Person",{"url":74,"name":95,"@type":96},"DocShare","Organization","application/pdf","2026-11-03","2026-08-28",true,{"@type":102,"interactionType":103,"userInteractionCount":52},"InteractionCounter",{"@type":104},"ViewAction",{"@type":106,"mainEntity":107},"FAQPage",[108,114,118],{"name":109,"@type":110,"acceptedAnswer":111},"What performance aspect of the MEMS switch does the paper aim to improve?","Question",{"text":112,"@type":113},"The work focuses on improving a vertical-movement MEMS switch by optimizing key technological dimensions to obtain a stable released structure.","Answer",{"name":115,"@type":110,"acceptedAnswer":116},"Which critical dimensions are investigated to avoid structural failure?",{"text":117,"@type":113},"The paper investigates the gap and the arm (beam) thickness to prevent stiction effects and improve mechanical stability.",{"name":119,"@type":110,"acceptedAnswer":120},"How are the switch behavior and structure characterized?",{"text":121,"@type":113},"Technological experiments and Scanning Electron Microscopy (SEM) are used, together with electro-thermo-mechanical simulations in CoventorWare and Comsol.","https://schema.org",{"og:url":83,"og:type":124,"og:title":65,"og:site_name":95,"og:description":67},"article",{"robots":126,"canonical":83},"index,follow",{"doc_id":128,"site_id":62},156455,1787959294,{"code":4,"msg":5,"data":131},{"doc_id":128,"user_id":132,"nickname":92,"user_avatar":133,"doc_module":4,"category_id":39,"category_name":40,"doc_title":65,"doc_description":67,"doc_content":134,"file_id":135,"file_url":136,"file_type":137,"file_size":138,"view_count":52,"is_deleted":4,"is_public":8,"is_downloadable":8,"audit_status":8,"page_count":139,"language":140,"language_code":63,"site_id":62,"html_lang":63,"table_of_contents":141,"faqs":142,"seo_title":143,"seo_description":67,"update_tm":129,"read_time":144,"preview_page_count":4},2336475401981,"https://ap-avatar.wpscdn.com/avatar/22000c94efd8d5204d?x-image-process=image/resize,m_fixed,w_180,h_180&k=1786935347598174694","ROMANIAN JOURNAL OF INFORMATION  \nSCIENCE AND TECHNOLOGY  \nVolume 22, Number 2, 2019, 124–134  \nMicrofabrication and experimental characterization of an Out-of-Plane MEMS switch  \nAngela BARACU 1 , Raluca M¨ULLER 1 , Rodica VOICU 1 , Catalin TIBEICA 1 , Adrian DINESCU 1 , Marius PUSTAN2 , and Corina BIRLEANU2  \n1National Institute for Research and Development in Microtechnologies – IMT Bucharest, Romania 2Micro & Nano Systems Laboratory, Technical University of Cluj-Napoca, Cluj-Napoca, Romania E-mail: [angela.baracu@imt.ro](angela.baracu@imt.ro) , [Marius.Pustan@omt.utcluj.ro](Marius.Pustan@omt.utcluj.ro)  \nAbstract. This paper presents an approach to improve the performance of a MicroElectro-Mechanical (MEMS) switch with vertical movement, manufactured using surface micromachining technology. We focused on the investigations of the critical technological dimensions (gap, thickness of the arms) in order to obtain a released, stable mechanical structure and to avoid the stiction effect of the metallic shapes. Technological experiments, Scanning Electron Microscopy (SEM) investigations, CoventorWare and Comsol simulations were performed in order to investigate the electro-thermo-mechanical behaviour of the switch.  \nKey-words: MEMS switch, thermal actuator, microfabrication, sacrificial layer.  \n1. Introduction and preliminary  \nThere are many types of driving mechanisms implemented in microactuators: magnetic, electrostatic or thermal. They are used in different applications for microassembling tools or are incorporated in MEMS like diffraction gratings or gear motors [1] . It is important to obtain small size actuators, compatible with complementary metal-oxide-semiconductor (CMOS) technology, with low actuation voltages.  \nMagnetic actuators convert the electric current into a mechanical output by employing the Lorentz force equation or the theory of magnetism. They present high actuation force and stroke (displacement), but are manufactured by materials which require more complicated technological steps. Electrostatic actuators operate on the principle of electric charge and the deflection can be accurately controlled.  \nThe electro-thermal actuators are of great interest compared with electostatic actuators (as combe-drive), due to their high output force, obtained for low input voltages. Between the electro-thermal actuator, based on Joule effect, Chevron type is mostly studied and used [2-4] . A  \nMicrofabrication and experimental characterization of an Out-of-Plane MEMS switch 125  \nChevron actuator is a MEMS device, obtained by micromachining techniques. By applying an actuation voltage to a suspended structure with a pre-bent angle, an in-plane movement will be produced.  \nIn this paper we propose an electro-thermal actuator with vertical movement and parallel suspending beams perpendicular to the central driving structure. The structure has an original design and is fabricated using surface micro-machining processes, similar with those described in [5] . A simple fabrication process, which uses a positive photoresist, S1805, as sacrificial layer ensures a very high reproducibility of the developed structures, compared to conventional MEMS electro-thermal actuators. Morover, the use of resist as a sacrificial layer reduces the manufacturing costs. The paper is focused on the investigations of the critical technological dimensions (gap, thickness of the arms) in order to obtain a released, stable mechanical structure and to avoid the stiction of metallic shapes. Technological experiments, SEM characterization and electro-thermo-mechanical simulations were performed.  \n2. Design  \nThe proposed MEMS vertical switch is driven by a metallic electro-thermal actuator. Due to the thermal Joule effect induced in the central mobile part, a movement in the vertical plane will occur and commute the switch from the off stage to on. The thermal driving structure contains a suspended central, rectangular shape connected by 5 pairs of sy","cbCaicXQkV5tvmUM","https://ap.wps.com/l/cbCaicXQkV5tvmUM","pdf",1550299,11,"English","# Introduction and preliminary\n# Design\n# Fabrication","[{\"question\":\"What performance aspect of the MEMS switch does the paper aim to improve?\",\"answer\":\"The work focuses on improving a vertical-movement MEMS switch by optimizing key technological dimensions to obtain a stable released structure.\"},{\"question\":\"Which critical dimensions are investigated to avoid structural failure?\",\"answer\":\"The paper investigates the gap and the arm (beam) thickness to prevent stiction effects and improve mechanical stability.\"},{\"question\":\"How are the switch behavior and structure characterized?\",\"answer\":\"Technological experiments and Scanning Electron Microscopy (SEM) are used, together with electro-thermo-mechanical simulations in CoventorWare and Comsol.\"}]","Microfabrication and experimental characterization of an Out-of-Plane MEMS switch | PDF",28]