[{"data":1,"prerenderedAt":-1},["ShallowReactive",2],{"doc-detail-119686-en":3,"doc-seo-119686-105":30,"detail-sidebar-cat-0-en-105":91},{"code":4,"msg":5,"data":6},0,"success",{"doc_id":7,"user_id":8,"nickname":9,"user_avatar":10,"doc_module":4,"category_id":11,"category_name":12,"doc_title":13,"doc_description":14,"doc_content":15,"file_id":16,"file_url":17,"file_type":18,"file_size":19,"view_count":4,"is_deleted":4,"is_public":20,"is_downloadable":20,"audit_status":20,"page_count":21,"language":22,"language_code":23,"site_id":24,"html_lang":23,"table_of_contents":25,"faqs":26,"seo_title":27,"seo_description":14,"update_tm":28,"read_time":29},119686,1099513958607,"Jiven","https://ap-avatar.wpscdn.com/avatar/100002390cf8733938c?x-image-process=image/resize,m_fixed,w_180,h_180&k=1778829742770036399",8,"Research & Report","Machine Learning Empowered Thin Film Acoustic Wave Sensing - Abstract","Thin film based surface acoustic wave (SAW) sensing is widely used for physical, chemical, and biological detection, yet performance degrades in complex environments due to coupled influences from multiple parameters. The work proposes a methodology that extracts critical information from scattering parameters and combines machine learning for multi-parameter decoupling. Using an AlScN/Si SAW device, it reports Bode quality factor 228 and electromechanical coupling around 2.3%. Demonstrations separately achieve high-precision UV and temperature sensing without mutual interference, providing anti-interference decoupling for thin film SAW sensors.","Northumbria Research Link  \nCitation: Tan, Kaitao, Ji, Zhangbin, Zhou, Jian, Deng, Zijing, Zhang, Songsong, Gu, Yuandong, Guo, Yihao, Zhuo, Fengling, Duan, Huigao and Fu, Yong Qing (2022) Machine Learning Empowered Thin Film Acoustic Wave Sensing. Applied Physics Letters. ISSN 0003-6951 (In Press)  \nPublished by: American Institute of Physics  \nURL:  \nThis version was downloaded from Northumbria Research Link:  \n[https://nrl. northumbria.ac.uk/id/eprint/51017/](https://nrl. northumbria.ac.uk/id/eprint/51017/)  \nNorthumbria University has developed Northumbria Research Link (NRL) to enable users to access the University’s research output. Copyright © and moral rights for items on NRL are retained by the individual author(s) and/or other copyright owners. Single copies of full items can be reproduced, displayed or performed, and given to third parties in any format or medium for personal research or study, educational, or not-for-profit purposes without prior permission or charge, provided the authors, title and full bibliographic details are given, as well as a hyperlink and/or URL to the original metadata page. The content must not be changed in any way. Full items must not be sold commercially in any format or medium without formal permission of the copyright holder. The full policy is available online: [http://nrl. northumbria.ac. uk/policies.html](http://nrl. northumbria.ac. uk/policies.html)  \nThis document may differ from the final, published version of the research and has been made available online in accordance with publisher policies. To read and/or cite from the published version of the research, please visit the publisher’s website (a subscription may be required.)  \nMachine Learning Empowered Thin Film Acoustic Wave Sensing  \nKaitao Tan\\#,1, Zhangbin Ji\\#,1, Jian Zhou*,1, Zijing Deng 1, Songsong Zhang2, Yuandong Gu2, Yihao Guo 1, Fengling Zhuo 1, Huigao Duan1, YongQing Fu3  \n1 College of Mechanical and Vehicle Engineering, Hunan University, Changsha 410082, China  \n2 Shanghai Industrial μTechnology Research Institute (SITRI), 235 Chengbei Rd, 201800 Shanghai, China  \n3 Faculty of Engineering and Environment, Northumbria University, Newcastle upon Tyne NE1 8ST, United Kingdom  \n\\# The same contributions  \n* Corresponding E-mail: [jianzhou@hnu.edu.cn](jianzhou@hnu.edu.cn)  \nABSTRACT  \nThin film based surface acoustic wave (SAW) technology has been extensively explored for physical, chemical and biological sensors. However, these sensors often show inferior performance for a specific sensing in complex environments, as they are affected by multiple influencing parameters and their coupling interferences. To solve these critical issues, we propose a methodology to extract critical information from the scattering parameter and combine machine learning method to achieve multi-parameter decoupling. We used AlScN film-based SAW device as an example, in which highly caxis orientated and low stress AlScN film was deposited on silicon substrate. The AlScN/Si SAW device showed a Bode quality factor value of 228 and an electromechanical coupling coefficient of ~2.3% . Two sensing parameters (i.e., ultraviolet or UV and temperature) were chosen for demonstration and the proposed machinelearning method was used to distinguish their influences. Highly precision UV sensing and temperature sensing were independently achieved without their mutual interferences. This work provides an effective solution for decoupling of multiparameter influences and achieving anti-interference effects in thin film based SAW sensing.  \nSurface acoustic wave (SAW) devices have been widely used for sensors such as  \nmass 1,2,temperature3,4 , humidity5-7, UV 8-10, gas molecules11,12 and biomolecules 12,13 . Conventional SAW devices are fabricated on bulk piezoelectric materials (such as LiNbO3 and Quartz) because of their low cost, smooth surface, stable material parameters, and high acoustic-electric conversion efficiency 2,11 . However, these convention","cbCaiciZB2adzd3q","https://ap.wps.com/l/cbCaiciZB2adzd3q","pdf",1524662,1,17,"English","en",105,"# Abstract\n## Proposed approach and motivation\n## AlScN/Si device performance\n## UV and temperature sensing demonstration\n## Anti-interference decoupling significance","[{\"question\":\"为什么薄膜基SAW传感在复杂环境中会出现性能下降？\",\"answer\":\"因为传感器会同时受到多个外界参数的影响，这些参数之间还存在耦合干扰，导致目标信号被掩盖或失真。\"},{\"question\":\"该研究如何实现多参数解耦与抗干扰？\",\"answer\":\"从散射参数中提取关键信息，并结合机器学习方法对多个参数的影响进行解耦，从而降低相互干扰。\"},{\"question\":\"如何验证方法在实际传感中的有效性？\",\"answer\":\"以AlScN/Si SAW器件为例，将紫外（UV）和温度作为演示参数，结果显示两者可被分别高精度识别且互不干扰。\"}]","Machine Learning Empowered Thin Film Acoustic Wave Sensing - Abstract | PDF",1785725750,43,{"code":4,"msg":31,"data":32},"ok",{"site_id":24,"language":23,"slug":33,"title":13,"keywords":34,"description":14,"schema_data":35,"social_meta":86,"head_meta":88,"extra_data":90,"updated_unix":28},"machine-learning-empowered-thin-film-acoustic-wave-sensing-abstract","",{"@graph":36,"@context":85},[37,54,68],{"@type":38,"itemListElement":39},"BreadcrumbList",[40,44,48,51],{"item":41,"name":42,"@type":43,"position":20},"https://docshare.wps.com","Home","ListItem",{"item":45,"name":46,"@type":43,"position":47},"https://docshare.wps.com/document/","Document",2,{"item":49,"name":12,"@type":43,"position":50},"https://docshare.wps.com/document/research-report/",3,{"item":52,"name":13,"@type":43,"position":53},"https://docshare.wps.com/document/machine-learning-empowered-thin-film-acoustic-wave-sensing-abstract/119686/",4,{"url":52,"name":13,"@type":55,"author":56,"headline":13,"publisher":58,"fileFormat":61,"inLanguage":23,"description":14,"dateModified":62,"datePublished":62,"encodingFormat":61,"isAccessibleForFree":63,"interactionStatistic":64},"DigitalDocument",{"name":9,"@type":57},"Person",{"url":41,"name":59,"@type":60},"DocShare","Organization","application/pdf","2026-08-03",true,{"@type":65,"interactionType":66,"userInteractionCount":4},"InteractionCounter",{"@type":67},"ViewAction",{"@type":69,"mainEntity":70},"FAQPage",[71,77,81],{"name":72,"@type":73,"acceptedAnswer":74},"为什么薄膜基SAW传感在复杂环境中会出现性能下降？","Question",{"text":75,"@type":76},"因为传感器会同时受到多个外界参数的影响，这些参数之间还存在耦合干扰，导致目标信号被掩盖或失真。","Answer",{"name":78,"@type":73,"acceptedAnswer":79},"该研究如何实现多参数解耦与抗干扰？",{"text":80,"@type":76},"从散射参数中提取关键信息，并结合机器学习方法对多个参数的影响进行解耦，从而降低相互干扰。",{"name":82,"@type":73,"acceptedAnswer":83},"如何验证方法在实际传感中的有效性？",{"text":84,"@type":76},"以AlScN/Si SAW器件为例，将紫外（UV）和温度作为演示参数，结果显示两者可被分别高精度识别且互不干扰。","https://schema.org",{"og:url":52,"og:type":87,"og:title":13,"og:site_name":59,"og:description":14},"article",{"robots":89,"canonical":52},"index,follow",{"doc_id":7,"site_id":24},{"code":4,"msg":5,"data":92},[93,97,101,105,110,115,120,123,128,131,135],{"id":20,"doc_module":4,"doc_module_name":46,"category_name":94,"show_sort_weight":95,"slug":96},"Story & Novel",90,"story-novel",{"id":47,"doc_module":4,"doc_module_name":46,"category_name":98,"show_sort_weight":99,"slug":100},"Literature",80,"literature",{"id":53,"doc_module":4,"doc_module_name":46,"category_name":102,"show_sort_weight":103,"slug":104},"Exam",70,"exam",{"id":106,"doc_module":4,"doc_module_name":46,"category_name":107,"show_sort_weight":108,"slug":109},5,"Comic",60,"comic",{"id":111,"doc_module":4,"doc_module_name":46,"category_name":112,"show_sort_weight":113,"slug":114},6,"Technology",50,"technology",{"id":116,"doc_module":4,"doc_module_name":46,"category_name":117,"show_sort_weight":118,"slug":119},7,"Healthcare",40,"healthcare",{"id":11,"doc_module":4,"doc_module_name":46,"category_name":12,"show_sort_weight":121,"slug":122},30,"research-report",{"id":124,"doc_module":4,"doc_module_name":46,"category_name":125,"show_sort_weight":126,"slug":127},9,"Religion & Spirituality",20,"religion-spirituality",{"id":126,"doc_module":4,"doc_module_name":46,"category_name":129,"show_sort_weight":126,"slug":130},"World Cup","world-cup",{"id":132,"doc_module":4,"doc_module_name":46,"category_name":133,"show_sort_weight":132,"slug":134},10,"Lifestyle","lifestyle",{"id":136,"doc_module":4,"doc_module_name":46,"category_name":137,"show_sort_weight":106,"slug":138},19,"General","general"]