[{"data":1,"prerenderedAt":-1},["ShallowReactive",2],{"doc-seo-289520-105":3,"detail-sidebar-cat-0-en-105":81,"doc-detail-289520-en":130},{"code":4,"msg":5,"data":6},0,"ok",{"site_id":7,"language":8,"slug":9,"title":10,"keywords":11,"description":12,"schema_data":13,"social_meta":74,"head_meta":76,"extra_data":78,"updated_unix":80},105,"en","interferometer-ims5600-ds1090vac-more-precision","interferoMETER IMS5600-DS10/90/VAC - More Precision","","More Precision interferoMETER IMS5600-DS10/90/VAC is an absolute nanometer-accurate sensor system for measuring step profiles. It supports compact installation in confined spaces, including an UHV version with titanium components for use in strong magnetic fields. The sensor offers a measuring rate up to 6 kHz, temperature-compensated stability under defined ambient ranges, and laser/optical alignment features, with versatile synchronization and configurable web-interface setup for presets and averaging.",{"@graph":14,"@context":73},[15,34,56],{"@type":16,"itemListElement":17},"BreadcrumbList",[18,23,27,31],{"item":19,"name":20,"@type":21,"position":22},"https://docshare.wps.com","Home","ListItem",1,{"item":24,"name":25,"@type":21,"position":26},"https://docshare.wps.com/document/","Document",2,{"item":28,"name":29,"@type":21,"position":30},"https://docshare.wps.com/document/technology/","Technology",3,{"item":32,"name":10,"@type":21,"position":33},"https://docshare.wps.com/document/interferometer-ims5600-ds1090vac-more-precision/289520/",4,{"url":32,"name":10,"@type":35,"image":36,"author":41,"headline":10,"publisher":44,"fileFormat":47,"inLanguage":8,"description":12,"dateModified":48,"datePublished":49,"encodingFormat":47,"isAccessibleForFree":50,"interactionStatistic":51},"DigitalDocument",{"url":37,"@type":38,"width":39,"height":40},"https://docshare.wps.com/thumbnails/interferometer-ims5600-ds1090vac-more-precision/289520.png","ImageObject",300,407,{"name":42,"@type":43},"supergirl","Person",{"url":19,"name":45,"@type":46},"DocShare","Organization","application/pdf","2026-10-08","2026-09-17",true,{"@type":52,"interactionType":53,"userInteractionCount":55},"InteractionCounter",{"@type":54},"ViewAction",10,{"@type":57,"mainEntity":58},"FAQPage",[59,65,69],{"name":60,"@type":61,"acceptedAnswer":62},"What is the measuring performance of interferoMETER IMS5600-DS10/90/VAC?","Question",{"text":63,"@type":64},"It provides absolute measurement with nanometer accuracy, a resolution below 30 pm, and a measuring rate continuously adjustable from 100 Hz up to 6 kHz. Linearity and temperature stability are specified with temperature compensation.","Answer",{"name":66,"@type":61,"acceptedAnswer":67},"How can it be integrated into confined spaces and vacuum environments?",{"text":68,"@type":64},"The system is designed for easy integration in confined spaces and includes an UHV variant. It supports vacuum-capable fiber optic connections with defined standard cable lengths.",{"name":70,"@type":61,"acceptedAnswer":71},"What communication interfaces and signal outputs are available?",{"text":72,"@type":64},"Digital interfaces include Ethernet, EtherCAT, RS422, PROFINET, and Ethernet/IP. Analog output supports 4…20 mA and 0…10 V, and switching outputs and error outputs are provided for control and monitoring.","https://schema.org",{"og:url":32,"og:type":75,"og:title":10,"og:site_name":45,"og:description":12},"article",{"robots":77,"canonical":32},"index,follow",{"doc_id":79,"site_id":7},289520,1789635567,{"code":4,"msg":82,"data":83},"success",[84,88,92,96,101,105,110,115,120,123,126],{"id":22,"doc_module":4,"doc_module_name":25,"category_name":85,"show_sort_weight":86,"slug":87},"Story & Novel",90,"story-novel",{"id":26,"doc_module":4,"doc_module_name":25,"category_name":89,"show_sort_weight":90,"slug":91},"Literature",80,"literature",{"id":33,"doc_module":4,"doc_module_name":25,"category_name":93,"show_sort_weight":94,"slug":95},"Exam",70,"exam",{"id":97,"doc_module":4,"doc_module_name":25,"category_name":98,"show_sort_weight":99,"slug":100},5,"Comic",60,"comic",{"id":102,"doc_module":4,"doc_module_name":25,"category_name":29,"show_sort_weight":103,"slug":104},6,50,"technology",{"id":106,"doc_module":4,"doc_module_name":25,"category_name":107,"show_sort_weight":108,"slug":109},7,"Healthcare",40,"healthcare",{"id":111,"doc_module":4,"doc_module_name":25,"category_name":112,"show_sort_weight":113,"slug":114},8,"Research & Report",30,"research-report",{"id":116,"doc_module":4,"doc_module_name":25,"category_name":117,"show_sort_weight":118,"slug":119},9,"Religion & Spirituality",20,"religion-spirituality",{"id":118,"doc_module":4,"doc_module_name":25,"category_name":121,"show_sort_weight":118,"slug":122},"World Cup","world-cup",{"id":55,"doc_module":4,"doc_module_name":25,"category_name":124,"show_sort_weight":55,"slug":125},"Lifestyle","lifestyle",{"id":127,"doc_module":4,"doc_module_name":25,"category_name":128,"show_sort_weight":97,"slug":129},19,"General","general",{"code":4,"msg":82,"data":131},{"doc_id":79,"user_id":132,"nickname":42,"user_avatar":133,"doc_module":4,"category_id":102,"category_name":29,"doc_title":10,"doc_description":12,"doc_content":134,"file_id":135,"file_url":136,"file_type":137,"file_size":138,"view_count":55,"is_deleted":4,"is_public":22,"is_downloadable":22,"audit_status":22,"page_count":26,"language":139,"language_code":8,"site_id":7,"html_lang":8,"table_of_contents":140,"faqs":141,"seo_title":142,"seo_description":12,"update_tm":80,"read_time":97},962088121634,"https://ap-avatar.wpscdn.com/davatar_9964176cb1d06d4a9deccf72a44ae3dc","More Precision   \ninterferoMETER IMS5600-DS10/90/VAC  \n􀂃 Absolute measurement with nanometer accuracy, suitable for the measurement of e.g. step profiles  \n􀂃 Easy integration in confined spaces  \n􀂃 Compact sensor for UHV and with right angle deflection  \n􀂃 Non-magnetic UHV version made of titanium, e.g. for use in strong magnetic fields  \n􀂃 Measuring rate up to 6 kHz for high speed measurements  \n􀂃 Ethernet / EtherCAT / RS422 /PROFINET / Ethernet/IP  \n􀂃 Robust controller with passive cooling  \n􀂃 Easy configuration via web interface  \nModel  \nMeasuring range  \nStart of measuring range  \nResolution [1]  \nMeasuring rate Linearity [2]  \nTemperature stability  \nLight source Laser class  \nLight spot diameter [3] Measuring angle [4] Target material Supply voltage Power consumption Signal input  \nDigital interface  \nSensor Controller  \nAnalog output Switching output Digital output  \nConnection  \nMounting  \nTemperature range  \nOptical  \nElectrical  \nSensor  \nController  \nStorage Operation  \nShock (DIN EN 60068-2-27) Vibration (DIN EN 60068-2-6)  \nProtection class (DIN EN 60529)  \nVacuum  \nMaterial  \nSensor Controller  \nSensor Controller  \nControl and indicator elements  \nIMS5600-DS10/90/VAC  \n1.5 mm  \nca. 10 mm  \n\u003C 30 pm  \ncontinuously adjustable from 100 Hz to 6 kHz  \n\u003C ±10 nm  \nLinearity: typ. 0.1 nm / K (without offset displacement)  \ntemperature compensated, stability \u003C 10 ppm between +15 ... +35 °C  \nNIR-SLED, wavelength 840 nm; Pilot laser: laser LED, wavelength 635 nm Class 1 according to DIN EN 60825-1: 2015-07; Pilot laser: Class 1, power (\u003C 0.2 mW)  \n10 µm  \n±2°  \nGlass, reflecting or diffuse surfaces [5]  \n24 VDC ±15 %  \napprox. 10 W (24 V)  \nSync in, trigger in, 2x encoders (A+, A- , B+, B- , index)  \nEthernet / EtherCAT / RS422 / PROFINET [6]  \n/ EtherNet/IP [6]  \n4 …20 mA / 0 ... 10 V (16 bit D/A converter)  \nError1-Out, Error2-Out  \nsync out  \nPlug-in fiber optic cable via E2000 socket (controller) and FC socket (vacuum feed-through); plug-in UHV fiber optic cable via FC socket (feed-through and sensor with vacuum capability); standard lengths 3 m, 5 m and 10 m; other cable lengths on request; bending radius: static 30 mm, dynamic 40 mm 3-pin supply terminal strip; encoder connection  \n(15-pin, HD-sub socket, max. cable length 3 m, 30 m with external encoder supply); RS422 connection socket (9-pin, Sub-D, max. cable length 30 m); 3-pin output terminal strip (max. cable length 30 m); 11-pin I/O terminal strip (max. cable length 30 m); RJ45 socket for Ethernet (out) / EtherCAT (in/out) (max. cable length 100 m)  \nClamping, mounting adapter (see accessories)  \nFree-standing, DIN rail mounting  \n-20 ... +70 °C  \nSensor: +5 ... +70 °C / Controller +15 ... +35 °C  \n15 g / 6 ms in XY axis, 1000 shocks each  \n2 g / 20 …500 Hz in XY axis, 10 cycles each  \nIP40  \nIP40  \nUHV (cable and sensor)  \nStainless steel; optional: titanium housing  \nAluminum housing, passive cooling  \nMultifunction button: two adjustable functions and reset to factory settings after 10 s; web interface for setup: selectable presets, freely selectable averaging, data reduction, setup management;  \n6 x color LEDs for intensity, range, SLED, pilot laser, status and power;  \npilot laser: can be switched on for sensor alignment  \n[1] Measuring rate 0.5 kHz, moving average over 64 values, measured differentially between the front and back of a thin glass plate in the mid of the measuring range (2 sigma)  \n[2] Maximum deviation from reference system over the entire measuring range, measured on front surface of ND filter  \n[3] In the mid of the measuring range  \n[4] Maximum sensor tilt angle that produces a usable signal on polished glass (n = 1.5) in the mid of the measuring range. The accuracy decreases when approaching the limit values.  \n[5] Non-transparent materials require optically dense surface at a wavelength of 840 nm  \n[6] Optional connection via interface module (see Accessories in the Confocal Catalog)  \ninterferoMETER  \nIMS5600-DS10/90/VAC  \nSensor  \n","cbCaiqr5yBqA4J27","https://ap.wps.com/l/cbCaiqr5yBqA4J27","pdf",403247,"English","# Specifications Overview\n## Optical and Measurement Performance\n## Interfaces, Outputs, and Connections\n## Power, Mounting, and Operating Conditions\n## Environmental Durability and Protection","[{\"question\":\"What is the measuring performance of interferoMETER IMS5600-DS10/90/VAC?\",\"answer\":\"It provides absolute measurement with nanometer accuracy, a resolution below 30 pm, and a measuring rate continuously adjustable from 100 Hz up to 6 kHz. Linearity and temperature stability are specified with temperature compensation.\"},{\"question\":\"How can it be integrated into confined spaces and vacuum environments?\",\"answer\":\"The system is designed for easy integration in confined spaces and includes an UHV variant. It supports vacuum-capable fiber optic connections with defined standard cable lengths.\"},{\"question\":\"What communication interfaces and signal outputs are available?\",\"answer\":\"Digital interfaces include Ethernet, EtherCAT, RS422, PROFINET, and Ethernet/IP. Analog output supports 4…20 mA and 0…10 V, and switching outputs and error outputs are provided for control and monitoring.\"}]","interferoMETER IMS5600-DS10/90/VAC - More Precision | PDF"]