[{"data":1,"prerenderedAt":-1},["ShallowReactive",2],{"detail-sidebar-cat-0-en-105":3,"doc-seo-265139-105":59,"doc-detail-265139-en":131},{"code":4,"msg":5,"data":6},0,"success",[7,13,18,23,28,33,38,43,48,51,55],{"id":8,"doc_module":4,"doc_module_name":9,"category_name":10,"show_sort_weight":11,"slug":12},1,"Document","Story & Novel",90,"story-novel",{"id":14,"doc_module":4,"doc_module_name":9,"category_name":15,"show_sort_weight":16,"slug":17},2,"Literature",80,"literature",{"id":19,"doc_module":4,"doc_module_name":9,"category_name":20,"show_sort_weight":21,"slug":22},4,"Exam",70,"exam",{"id":24,"doc_module":4,"doc_module_name":9,"category_name":25,"show_sort_weight":26,"slug":27},5,"Comic",60,"comic",{"id":29,"doc_module":4,"doc_module_name":9,"category_name":30,"show_sort_weight":31,"slug":32},6,"Technology",50,"technology",{"id":34,"doc_module":4,"doc_module_name":9,"category_name":35,"show_sort_weight":36,"slug":37},7,"Healthcare",40,"healthcare",{"id":39,"doc_module":4,"doc_module_name":9,"category_name":40,"show_sort_weight":41,"slug":42},8,"Research & Report",30,"research-report",{"id":44,"doc_module":4,"doc_module_name":9,"category_name":45,"show_sort_weight":46,"slug":47},9,"Religion & Spirituality",20,"religion-spirituality",{"id":46,"doc_module":4,"doc_module_name":9,"category_name":49,"show_sort_weight":46,"slug":50},"World Cup","world-cup",{"id":52,"doc_module":4,"doc_module_name":9,"category_name":53,"show_sort_weight":52,"slug":54},10,"Lifestyle","lifestyle",{"id":56,"doc_module":4,"doc_module_name":9,"category_name":57,"show_sort_weight":24,"slug":58},19,"General","general",{"code":4,"msg":60,"data":61},"ok",{"site_id":62,"language":63,"slug":64,"title":65,"keywords":66,"description":67,"schema_data":68,"social_meta":124,"head_meta":126,"extra_data":128,"updated_unix":130},105,"en","ged-gas-exchange-device","GED - Gas Exchange Device","","GED (Gas Exchange Device) is an analytical system designed to measure metallic particle impurities at ultralow levels in gases with far less sample preparation than conventional ICP-MS workflows. By using a special membrane that exchanges incoming sample gas with Ar sweep gas at over 99.99% efficiency, particles are released into the Ar stream and directly introduced to the ICP-MS plasma. Applications span environmental monitoring, semiconductor process gases, geological sampling, tobacco smoke, and vehicle exhaust, with examples including Pb, U isotopes, and transient hydride/oxide signals.",{"@graph":69,"@context":123},[70,84,106],{"@type":71,"itemListElement":72},"BreadcrumbList",[73,77,79,82],{"item":74,"name":75,"@type":76,"position":8},"https://docshare.wps.com","Home","ListItem",{"item":78,"name":9,"@type":76,"position":14},"https://docshare.wps.com/document/",{"item":80,"name":30,"@type":76,"position":81},"https://docshare.wps.com/document/technology/",3,{"item":83,"name":65,"@type":76,"position":19},"https://docshare.wps.com/document/ged-gas-exchange-device/265139/",{"url":83,"name":65,"@type":85,"image":86,"author":91,"headline":65,"publisher":94,"fileFormat":97,"inLanguage":63,"description":67,"dateModified":98,"datePublished":99,"encodingFormat":97,"isAccessibleForFree":100,"interactionStatistic":101},"DigitalDocument",{"url":87,"@type":88,"width":89,"height":90},"https://docshare.wps.com/thumbnails/ged-gas-exchange-device/265139.png","ImageObject",300,407,{"name":92,"@type":93},"Riley","Person",{"url":74,"name":95,"@type":96},"DocShare","Organization","application/pdf","2026-10-08","2026-09-14",true,{"@type":102,"interactionType":103,"userInteractionCount":105},"InteractionCounter",{"@type":104},"ViewAction",12,{"@type":107,"mainEntity":108},"FAQPage",[109,115,119],{"name":110,"@type":111,"acceptedAnswer":112},"What problem does the GED solve in ICP-MS gas analysis?","Question",{"text":113,"@type":114},"GED enables direct introduction of gases and releases metallic particles into the Ar stream, reducing the need for time-consuming sample pre-treatment and improving sensitivity for ppt/sub-ppt impurities.","Answer",{"name":116,"@type":111,"acceptedAnswer":117},"How does the GED membrane work?",{"text":118,"@type":114},"The membrane exchanges the sample gas with Ar sweep gas. Particles do not pass through the membrane and remain inside, then come out in the Ar stream at the outlet for direct ICP-MS introduction.",{"name":120,"@type":111,"acceptedAnswer":121},"What are the key application areas mentioned for GED?",{"text":122,"@type":114},"The document lists applications in environmental air, semiconductor gases, geological/solid-related measurements, tobacco smoke, and car exhaust, with additional discussion of combining with particle counters.","https://schema.org",{"og:url":83,"og:type":125,"og:title":65,"og:site_name":95,"og:description":67},"article",{"robots":127,"canonical":83},"index,follow",{"doc_id":129,"site_id":62},265139,1789392730,{"code":4,"msg":5,"data":132},{"doc_id":129,"user_id":133,"nickname":92,"user_avatar":134,"doc_module":4,"category_id":29,"category_name":30,"doc_title":65,"doc_description":67,"doc_content":135,"file_id":136,"file_url":137,"file_type":138,"file_size":139,"view_count":105,"is_deleted":4,"is_public":8,"is_downloadable":8,"audit_status":8,"page_count":29,"language":140,"language_code":63,"site_id":62,"html_lang":63,"table_of_contents":141,"faqs":142,"seo_title":143,"seo_description":67,"update_tm":130,"read_time":144},1374391975076,"https://ap-avatar.wpscdn.com/avatar/14000253ca4ec9f6853?x-image-process=image/resize,m_fixed,w_180,h_180&k=1783305029341752051","GED  \nGas Exchange Device  \nRORZE IAS Inc.  \nGED can measure ppq level of metallic particles in gases  \nThe system was originally developed to analyze metallic particles in environmental air using Inductively Coupled Plasma Mass Spectrometry (ICP-MS) . It is now expanded to special gases used in semiconductor industry.  \nICP-MS is one of the most sensitive analytical techniques to determine metallic elements in various samples. Since aqueous sample is basically introduced to the Ar plasma by means of a nebulizer and a spray chamber, gas analysis requires time consuming sample pre-treatment such as filtration and bubbling. In addition, it is extremely difficult to determine ppt or sub-ppt level impurities in semiconductor gases. If gases can be directly introduced to the Ar plasma, metallic particles can be analyzed without the pre-treatment with much higher sensitivity. However, ICP-MS has limitation to introduce other gases into the plasma because it is difficult to sustain the plasma.  \nThe GED uses a special membrane that can exchange other gases with Ar gas. The gas exchange efficiency is more than 99.99% . When a sample gas contains particles, the sample gas is exchanged by Ar gas and particles come out in Ar gas stream atthe exit of GED, which can be directly introduced to the Ar plasma of ICP-MS and analyzed.  \nAs a result, a single ppq level of metallic impurities can be analyzed directly.  \nAr sweep gas in  \nMembrane tube  \nSample gas in  \nAr + sample gas out  \nFig.1 Principle of GED  \nThe principle of GED is based on the Dalton’s law and Graham’s law. A sample gas is introduced to an inner side of membrane tube and Ar gas is introduced to an outer side of membrane tube as shown above. Since the partial pressure of sample gas inside the membrane tube is higher than the outside, the sample gas diffuses into the outside of membrane tube. On the other hand, the partial pressure of Ar gas outside the membrane tube is higher than the inside, the Ar gas diffuses into the inside of membrane. Ar sweep gas flow is much higher than the sample gas flow and the sample gas is completely replaced with Ar gas (>99.99%) while particles don’t pass through the membrane and remain inside the membrane tube. As a result, the particles come out from GED in Ar gas stream, which are introduced to the Ar plasma of ICP-MS and analyzed.  \nMajor applications:  \n􀀁 Environment  \n- There are 30-60 ng/m3 of Pb and 0.1- 0.3 ng/m3 of U in normal environmental air. Many 208 Pb particles were detected with 10 msec integration time per point as shown in Fig.2 .  \n- 235 U and 238 U in environmental air were also detected with 10 msec integration time and 10 sec integration time as shown in Fig.3 . Shorter integration time can detect individual particle and longer integration time can accumulate particles that gives accurate quantitation analysis.  \nThe natural abundances of 235 U and  \n238 U are 0.72% and 99.27%, respectively, and the results with longer integration time showed good isotope ratio agreement.  \n- Fig.4 show the results of 56 Fe particle analysis inside and outside a clean room. Outside clean room showed significant amount of 56 Fe particles.  \n56Fe  \n10 msec  \n56Fe  \n10 msec  \nFig.4 56 Fe environmental air inside (upper) and outside (lower) clean room  \n208 Pb Outside of building  \nInside of building  \nWith filter  \nFig.2 208 Pb in normal environmental air  \n238U  \n10 msec  \n235U  \n10 msec  \n10 sec  \nFig.3 238 U and 235 U in environmental air  \n􀀁 Semiconductor  \n- NH3 gas used for semiconductor industry was analyzed. Fig.5 represents the transient signals with 1 msec integration time with and without the filter. As clearly seen on the left hand side, many particles such as Cu, Zn and Pb were detected without the filter. The Cu concentration detected are around 0.03 ppt(wt) .  \nCu63  \nZn66  \nPb208  \n100  \n90  \n80  \n70  \n60  \n50  \n40  \n30  \n20  \n10  \n0  \nPb208  \n Pb208  \n1  \n4312  \n8623129341724521556  \n2586730178  \n3448938800  \n4311147422  \n","cbCaih5Udb6i42h3","https://ap.wps.com/l/cbCaih5Udb6i42h3","pdf",438246,"English","# Major applications\n## Environment\n## Semiconductor\n## Geological\n## Tobacco\n## Exhaust gas from cars\n## Combination with particle counters","[{\"question\":\"What problem does the GED solve in ICP-MS gas analysis?\",\"answer\":\"GED enables direct introduction of gases and releases metallic particles into the Ar stream, reducing the need for time-consuming sample pre-treatment and improving sensitivity for ppt/sub-ppt impurities.\"},{\"question\":\"How does the GED membrane work?\",\"answer\":\"The membrane exchanges the sample gas with Ar sweep gas. Particles do not pass through the membrane and remain inside, then come out in the Ar stream at the outlet for direct ICP-MS introduction.\"},{\"question\":\"What are the key application areas mentioned for GED?\",\"answer\":\"The document lists applications in environmental air, semiconductor gases, geological/solid-related measurements, tobacco smoke, and car exhaust, with additional discussion of combining with particle counters.\"}]","GED - Gas Exchange Device | PDF",15]