[{"data":1,"prerenderedAt":-1},["ShallowReactive",2],{"detail-sidebar-cat-0-en-105":3,"doc-detail-202225-en":59,"doc-seo-202225-105":82},{"code":4,"msg":5,"data":6},0,"success",[7,13,18,23,28,33,38,43,48,51,55],{"id":8,"doc_module":4,"doc_module_name":9,"category_name":10,"show_sort_weight":11,"slug":12},1,"Document","Story & Novel",90,"story-novel",{"id":14,"doc_module":4,"doc_module_name":9,"category_name":15,"show_sort_weight":16,"slug":17},2,"Literature",80,"literature",{"id":19,"doc_module":4,"doc_module_name":9,"category_name":20,"show_sort_weight":21,"slug":22},4,"Exam",70,"exam",{"id":24,"doc_module":4,"doc_module_name":9,"category_name":25,"show_sort_weight":26,"slug":27},5,"Comic",60,"comic",{"id":29,"doc_module":4,"doc_module_name":9,"category_name":30,"show_sort_weight":31,"slug":32},6,"Technology",50,"technology",{"id":34,"doc_module":4,"doc_module_name":9,"category_name":35,"show_sort_weight":36,"slug":37},7,"Healthcare",40,"healthcare",{"id":39,"doc_module":4,"doc_module_name":9,"category_name":40,"show_sort_weight":41,"slug":42},8,"Research & Report",30,"research-report",{"id":44,"doc_module":4,"doc_module_name":9,"category_name":45,"show_sort_weight":46,"slug":47},9,"Religion & Spirituality",20,"religion-spirituality",{"id":46,"doc_module":4,"doc_module_name":9,"category_name":49,"show_sort_weight":46,"slug":50},"World Cup","world-cup",{"id":52,"doc_module":4,"doc_module_name":9,"category_name":53,"show_sort_weight":52,"slug":54},10,"Lifestyle","lifestyle",{"id":56,"doc_module":4,"doc_module_name":9,"category_name":57,"show_sort_weight":24,"slug":58},19,"General","general",{"code":4,"msg":5,"data":60},{"doc_id":61,"user_id":62,"nickname":63,"user_avatar":64,"doc_module":4,"category_id":39,"category_name":40,"doc_title":65,"doc_description":66,"doc_content":67,"file_id":68,"file_url":69,"file_type":70,"file_size":71,"view_count":72,"is_deleted":4,"is_public":8,"is_downloadable":8,"audit_status":8,"page_count":73,"language":74,"language_code":75,"site_id":76,"html_lang":75,"table_of_contents":77,"faqs":78,"seo_title":79,"seo_description":66,"update_tm":80,"read_time":81,"preview_page_count":4},202225,549768064778,"Felix Montgomery","https://ap-avatar.wpscdn.com/davatar_6f874abed73319feea01a86fa6f0fab8","Aluminum Nitride Sensors for Harsh Environments - Dissertation","Aluminum nitride is highlighted as a strong ceramic for harsh environments, combining high-temperature survivability, mechanical robustness, and piezoelectric sensing capability when fabricated as well-controlled thin polycrystalline films. The dissertation investigates optimized deposition parameters and characterization methods for film stress gradients, and presents two fabrication processes to integrate multiple sensors on a single chip. A key outcome is multi-order performance improvement in aluminum nitride accelerometers, alongside high-temperature tuning-fork strain sensing up to at least 570°C.","UC Berkeley  \nUC Berkeley Electronic Theses and Dissertations  \nTitle  \nAluminum Nitride Sensors for Harsh Environments  \nPermalink  \n[https://escholarship.org/uc/item/7kq5s183](https://escholarship.org/uc/item/7kq5s183)  \nAuthor  \nGoericke, Fabian Thomas  \nPublication Date  \n2013  \nPeer reviewed|Thesis/dissertation  \n[eScholarship.org](eScholarship.org) Powered by the California Digital Library  \nUniversity of California  \nAluminum Nitride Sensors for Harsh Environments  \nby  \nFabian Thomas Goericke  \nA dissertation submitted in partial satisfaction of the requirements for the degree of  \nDoctor of Philosophy in  \nEngineering – Mechanical Engineering in the  \nGraduate Division  \nof the  \nUniversity of California, Berkeley  \nCommittee in charge:  \nProfessor Albert P. Pisano, Chair Professor Tsu-Jae King Liu Professor Liwei Lin  \nFall 2013  \nAluminum Nitride Sensors for Harsh Environments  \nCopyright © 2013  \nby  \nFabian Thomas Goericke  \nAbstract  \nAluminum Nitride Sensors for Harsh Environments  \nby  \nFabian Thomas Goericke  \nDoctor of Philosophy in Engineering – Mechanical Engineering  \nUniversity of California, Berkeley  \nProfessor Albert P. Pisano, Chair  \nHarsh environment applications include high temperature, pressure and mechanical shock. Aluminum nitride is a strong ceramic material with very good high temperature survivability. It also has piezoelectric properties that can be used for sensing applications and it can be deposited with good control as thin polycrystalline film for the fabrication of micro-electromechanical systems. In this dissertation, optimized deposition parameters for aluminum nitride films and characterization techniques for film stress gradients are investigated. Furthermore, two di􀀋erent fabrication processes are presented that can be used to build several sensors and other micromechanical elements on a single chip. The more advanced process includes a bulk-micromachining step that enables the use of the silicon substrate as large proof masses for accelerometers. At the same time, the fabrication process can be used to create membranes for devices such as pressure sensors. Several di􀀋erent devices are discussed from the device design and theoretical analysis to the fabrication and experimental verification. The most significant contribution is the performance improvement of several orders of magnitude that can be achieved with aluminum nitride accelerometers by switching from double-ended tuning forks to triple-beam tuning forks and by using the newly discovered sensing concept of bent-beam sensing. Additionally, rate gyroscopes were presented that use aluminum nitride as the structural material and for both actuating the drive axis and reading the sense axis. Both types of sensors have potential applications in inertial navigation at high temperature. Double-ended tuning forks and triple-beam tuning forks were tested in hot environment and it was shown that they can be used as highly sensitive strain sensors up to at least 570 􀀎 C. Additionally, a testing setup for high temperature testing of accelerometers was demonstrated.  \nContents  \nContents i  \nList of Figures iv  \nList of Tables x  \nAcknowledgements xiv  \n1 Introduction 1  \n1.1 MEMS market .................................... 2  \n1.2 Previous work ..................................... 3  \n1.3 Dissertation structure ................................. 4  \n2 Aluminum Nitride Deposition 5  \n2.1 Properties of aluminum nitride ............................ 5  \n2.2 Reactive sputtering of aluminum nitride films .................... 6  \n2.3 Aluminum nitride characterization .......................... 9  \n2.3.1 Thickness measurement ........................... 9  \n2.3.2 Rocking curve measurement ......................... 10  \n2.3.3 Film stress measurement ........................... 11  \n2.4 Sputtering parameter optimization .......................... 12  \n2.4.1 First wafer e􀀋ect ............................... 12  \n2.4.2 E􀀋ect of gas flow rates ..........","cbCaicW5lgtLigPF","https://ap.wps.com/l/cbCaicW5lgtLigPF","pdf",35904409,17,140,"English","en",105,"# Contents\n## List of Figures\n## List of Tables\n## Acknowledgements\n## 1 Introduction\n## 2 Aluminum Nitride Deposition\n## 3 Fabrication Processes\n## 4 Tuning Fork Sensors\n## 5 Rate Gyroscopes\n## 6 High Temperature Testing","[{\"question\":\"What harsh-environment conditions does the work target for aluminum nitride sensors?\",\"answer\":\"The dissertation focuses on high temperature, pressure, and mechanical shock environments, where aluminum nitride can maintain strong performance.\"},{\"question\":\"How are aluminum nitride films deposited and characterized in this dissertation?\",\"answer\":\"It studies optimized deposition parameters for aluminum nitride films using reactive sputtering, and employs characterization techniques to measure film properties and stress gradients.\"},{\"question\":\"What advances improve accelerometer performance and sensing capability?\",\"answer\":\"Performance improves by switching from double-ended tuning forks to triple-beam tuning forks and by using the bent-beam sensing concept; tuning forks are also shown to work as sensitive strain sensors at high temperatures.\"}]","Aluminum Nitride Sensors for Harsh Environments - Dissertation | PDF",1788543732,353,{"code":4,"msg":83,"data":84},"ok",{"site_id":76,"language":75,"slug":85,"title":65,"keywords":86,"description":66,"schema_data":87,"social_meta":141,"head_meta":143,"extra_data":145,"updated_unix":80},"aluminum-nitride-sensors-for-harsh-environments-dissertation","",{"@graph":88,"@context":140},[89,103,123],{"@type":90,"itemListElement":91},"BreadcrumbList",[92,96,98,101],{"item":93,"name":94,"@type":95,"position":8},"https://docshare.wps.com","Home","ListItem",{"item":97,"name":9,"@type":95,"position":14},"https://docshare.wps.com/document/",{"item":99,"name":40,"@type":95,"position":100},"https://docshare.wps.com/document/research-report/",3,{"item":102,"name":65,"@type":95,"position":19},"https://docshare.wps.com/document/aluminum-nitride-sensors-for-harsh-environments-dissertation/202225/",{"url":102,"name":65,"@type":104,"image":105,"author":110,"headline":65,"publisher":112,"fileFormat":115,"inLanguage":75,"description":66,"dateModified":116,"datePublished":117,"encodingFormat":115,"isAccessibleForFree":118,"interactionStatistic":119},"DigitalDocument",{"url":106,"@type":107,"width":108,"height":109},"https://docshare.wps.com/thumbnails/aluminum-nitride-sensors-for-harsh-environments-dissertation/202225.png","ImageObject",300,407,{"name":63,"@type":111},"Person",{"url":93,"name":113,"@type":114},"DocShare","Organization","application/pdf","2026-11-01","2026-09-04",true,{"@type":120,"interactionType":121,"userInteractionCount":72},"InteractionCounter",{"@type":122},"ViewAction",{"@type":124,"mainEntity":125},"FAQPage",[126,132,136],{"name":127,"@type":128,"acceptedAnswer":129},"What harsh-environment conditions does the work target for aluminum nitride sensors?","Question",{"text":130,"@type":131},"The dissertation focuses on high temperature, pressure, and mechanical shock environments, where aluminum nitride can maintain strong performance.","Answer",{"name":133,"@type":128,"acceptedAnswer":134},"How are aluminum nitride films deposited and characterized in this dissertation?",{"text":135,"@type":131},"It studies optimized deposition parameters for aluminum nitride films using reactive sputtering, and employs characterization techniques to measure film properties and stress gradients.",{"name":137,"@type":128,"acceptedAnswer":138},"What advances improve accelerometer performance and sensing capability?",{"text":139,"@type":131},"Performance improves by switching from double-ended tuning forks to triple-beam tuning forks and by using the bent-beam sensing concept; tuning forks are also shown to work as sensitive strain sensors at high temperatures.","https://schema.org",{"og:url":102,"og:type":142,"og:title":65,"og:site_name":113,"og:description":66},"article",{"robots":144,"canonical":102},"index,follow",{"doc_id":61,"site_id":76}]